Dear participants,
at the beginning of the Web-Event you will be asked to login over the button „Event Room“ below.
(Recently the Event Room is closed.) This workshop will be handled with Microsoft Teams.
During the event week the access will be secured by password. Registered participants will receive their login data via E-mail.
Event ROOM
Meeting Room 1
Meeting Room 2
Meeting Room 3
PROGRAM
12:30
Welcome & Market Place
Discover the event website and
meet other participants.
13:00 Introduction
„Overview of simulation concepts for atomic layer processing“
Jörg Schuster, Fraunhofer ENAS, Chemnitz, Germany
13:20 Workshop Session 1
13:20 Keynote Presentation
„Concepts and Preconceptions – the Outlook for Simulations in ALD“
Simon Elliott, Schrödinger Inc., New York, USA
13:50 Presentation
„Atomistic simulations of atomic layer processes“
Xiao Hu, Center for Microtechnologies, Technische Universität Chemnitz, Chemnitz, Germany
14:10 Presentation 
„In silico ALD – more bits and less pieces“
Henrik Pedersen, Linköping University, Linköping, Sweden
14:30 Break
14:45 Discussion
Simulation Talk
moderated by Jonas Sundqvist and Linda Jäckel
Experts – Simon Elliott, Schrödinger Inc. and Jacques Kools, Encapsulix
15:30 WORKSHOP Session 2
15:30 Presentation 
„The DSMC Method – A Simulation Approach for Low Pressure ALD Processes“
Asim Mirza, boltzplatz GmbH, Stuttgart, Germany
15:50 Presentation 
„Modeling and Simulation of ALD in a Level Set Framework“
Lado Filipovic, Institute for Microelectronics, Technische Universität Wien, Vienna, Austria
16:10 Presentation
„3D Monte Carlo simulations for a better understanding of conformality of ALD“
Véronique Cremers, Department of Solid State Sciences, Ghent University, Ghent, Belgium
16:30 Presentation
„Computational modelling of ALD reactors: Linking transport phenomena with surface mechanisms“
Giorgos Gakis, National Technical University of Athens, Athens, Greece
16:50 Presentation 
„Simulation for design of ALD equipment“
Jacques Kools, Encapsulix S.A., Simiane-Collongue, France
17:15 END of offizial Program
17:15 – 17:45
After Work Discussion
moderated by Jonas and Linda
You are invited to get in discussion also after the official end of the program. All meeting rooms will stay open for you.
DOWNLOAD & Communication
- Program [PDF] (updated March 22, 2021)
- Communication Guide [PDF]
- Participant List [PDF]
- Technical Guide [PDF]
This Live Web-Event shall give you the opportunity to get into discussion and get to know each other. Listen to speakers and ask questions. But also discover the possibilities to speak with other participants in open or direct discussion.
Live Presentations
Meet the speakers in the Event Room and ask your questions live or in the chat.
Meeting Rooms
Use the three Meeting Rooms
(on top of this event website) and make appointments with your people of interest.
Simulation Talk
Moderated discussion with experts about multi-scale approaches. Ask your questions and discuss together with us about the initiation of next activities.
Contact Board
You are new in the Community? Present your Personal Contact Card online and easily find the right partners for you.
CONTACT Board
PERSONAL CONTACT CARD
James Smith, Company, City, Country
E-Mail: name@company.com
Phone: +XX 134 5678910
Working Field: Simulation software Development
Search & Find: I am looking for a contact to discuss applications for process simulations.
PERSONAL CONTACT CARD
Samantha Watson, Company, City, Country
E-Mail: name@company.com
Phone: +XX 134 5678910
Working Field: ALD process development
Search & Find: How can I simulate my plasma ALD process? (low time level, but much information)
You would like to publish your personal contact card during the event?
The access to this website will be secured by password when the event will start and will be visible to participants only. Please write us an E-mail with the needed information as the examples above and the name of the event „Simulation for ALD“ to info@efds.org.
Market Place
- Dr. Jonas Sundqvist
- Värmdö, Sweden
- +49 152 0294 3083
- jonas.sundqvist@baldengineering.com
Our services for you:
- Dr.-Ing. Asim Mirza
- Stuttgart, Germany
- +49 711 995 975 60
- mirza@boltzplatz.eu
Our services for you:
This could be your advertisment!
- European Society of Thin Films
- Gostritzer Str. 63, 01217 Dresden, Germany
- +49 351 8718370
- info@efds.org
Our services for you:
Here YOUR company or institute sould be presented?
Please call us or write an E-mail, when you want to know more …
Phone +49 351 8718370 Email: info@efds.org
- Dr. Jonas Sundqvist
- Värmdö, Sweden
- +49 152 0294 3083
- jonas.sundqvist@baldengineering.com
Our services for you:
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