When used with MultiTherm products, Controls Workbench software provides support for advanced options that include model-based temperature control, cascading loops and PID gain scheduling. It communicates to MKS devices such as mass flow controllers (MFCs) and capacitance manometers using Modbus TCP/IP, enabling Ethernet communication to all compatible devices, while enabling custom visualizations with device specific views and charts for individual processes or across an entire plant or fab. Controls Workbench software offers built-in data logging, charting, and data exporting; advanced process diagnostic capabilities; incorporation of PLC and IEC 61131-3 projects and recipes; and the ability to remotely activate, pause or stop process routines.

Learn more: Visit the Controls Workbench Software web page

About MKS:

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor, and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, vacuum technology, photonics, lasers, optics and motion control. Our primary served markets include semiconductor capital equipment, industrial manufacturing, environmental, medical, life sciences and scientific research.