scia Systems GmbH



  • Construction of deposition and plasma treatment plant
  • Plasma technology components


  • Optical device construction, photonics
  • Sensor and microsystem technology, smart systems
  • Medical technology and life sciences

Member since: 2013

scia Systems GmbH

Annaberger Str. 240
09125 Chemnitz (Germany)

+49 371 5347 780

+49 371 5347 781

Marcel Demmler


scia Systems manufactures advanced ion beam and plasma processing equipment, for the production of microelectronics, MEMS and precision optical components, in both, high volume production as well as in research and development environments. Due to their flexible and modular design, several vacuum process chambers can be combined into cluster or in-line solutions, according to customer-specific requirements.

scia Systems provides design, development, manufacturing and after-sales service together with its worldwide network of sales and service partners.

Technology Portfolio

  • Ion Beam Etching and Milling (IBE/IBM)
  • Dual Ion Beam Deposition (DIBD)
  • Ion Beam Trimming (IBT)
  • Physical Vapor Deposition (PVD)
  • Plasma Enhanced Chemical Vapor Deposition (PECVD)
  • Reactive Ion Etching (RIE)
  • Plasma Cleaning