MKS Instruments Deutschland GmbH



  • Vacuum components
  • Plasma technology components
  • Vapour deposition materials, targets
  • Vacuum and plasma diagnostics instruments

Member since: 1998

MKS Instruments Deutschland GmbH

Schatzbogen 43
81829 München (Germany)

+49 89 4200080


Christian Ossmann


MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity.

Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, vacuum technology, photonics, lasers, optics and motion control. Our primary served markets are manufacturers of capital equipment for thin film including semiconductor devices, process manufacturing, environmental, life sciences and scientific research.

Global Leadership

  • Precise control of pressure, flow, composition, position, motion & stability
  • Generation and delivery of reactive gases, laser power and electrical power
  • Integrated solutions for process modules and systems; inspection and lithography modules and systems

Global Presence

Austria , China, Denmark, France, Germany, Israel, Italy, Japan, Korea, Mexico, Romania, Singapore, Sweden, Taiwan, UK, USA

Member News:

Andover, Mass., April 29, 2016 -- MKS Instruments, Inc. (NASDAQ:MKSI), a global provider of technologies that enable advanced processes and improve productivity, today announced the completion of its previously announced acquisition of all of the issued and outstanding common shares of Newport Corporation, a worldwide leader in photonics solutions, for $23.00 per share, or approximately $905 million, and repayment of approximately $93 million of Newport's U.S. indebtedness.

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Compatible with MKS Automation Platform and MultiTherm™ Product Family

Andover, Mass., June 29, 2016 -- MKS Instruments, Inc. (NASDAQ:MKSI), a global provider of technologies that enable advanced processes and improve productivity, will introduce and demonstrate Controls Workbench (CWB) software at Semicon West, 2016. CWB provides a single interface for controlling, tuning, monitoring, and configuring, multiple MKS controllers, including the MKS Automation Platform and the MultiTherm product family. CWB leverages multivariate analytics for advanced auto tuning that improves process performance compared to existing tuning approaches. Ideal for vacuum and temperature control applications, CWB features user customizable dashboards that allow for easy process visualization and remote process control.

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