EBARA Precision Machinery Europe GmbH



  • Vacuum components
  • Vacuum and plasma diagnostics instruments

Member since: 1998

EBARA Precision Machinery Europe GmbH

Am Promigberg 20
01108 Dresden (Germany)

+49 351 888 5767

+49 351 888 5766



Oliver Lossau


EBARA Precision Machinery Europe GmbH (EPME) was founded in 1994 as subsidiary of the Japanese EBARA Corporation for the field of Semiconductor and related markets. EPME covers Europe, Middle East/Africa and Eastern Europe. 133 employees are engaged in sales, service and engineering of a broad product range, e.g. vacuum pumps or CMP tools, such as the realization of comprehensive systems in the semiconductor and coating industry.

Our main sites are Hanau and Dresden in Germany, Evry in France, Livingston and Newcastle in Great Britain. Our fully equipped service centre located in Livingston employs highly skilled vacuum engineers to maintain and refurbish our vacuum pumps. This facility also services 3rd party brand pumps: dry pumps, turbo pumps, scroll pumps, wet pumps and associated components. EPME opened a CMP refurbishment center in Newcastle to meet the increasing demand for refurbished CMP equipment, helping customers reduce their capital spending.

EPME is further expanding its role by bringing to the market products, services and solutions which are distinguished by technical leadership, high quality and reliability, low energy consumption. EPME staff feature are known for their high quality orientation and customer commitment .