Aurion Anlagentechnik GmbH



  • Construction of deposition and plasma treatment plant
  • Plasma technology components
  • Engineering companies and consulting

Member since: 2010

Aurion Anlagentechnik GmbH

Am Sandborn 14,
63500 Seligenstadt (Germany)

+49 6182 9628 23

+49 6182 9628 16

Joachim Scherer


Aurion supplies batch, cluster and inline systems for the treatment of and the coating on surfaces by means of plasma processes, as well as radio frequency components. Plasma technologies employed include activation, cleaning and etching with atmospheric plasma, reactive ion etching and microwave downstream plasma, coating with PVD (physical vapor deposition, sputtering) and PECVD (plasma enhanced chemical vapor deposition).

RF components include automatic impedance matching networks, filters, switches, power splitters, phase shifters, flexible connectors and many more.

Furthermore Aurion´s team offers its extensive expertise in the areas of plasma technology and radio frequency technology for consulting services and training courses.