ALD For Industry 2020 | Workshop, Tutorial & Exhibition

Workshop | Tutorial

Thank you to all exhibitors, sponsors, speakers and participants. The event was finished successfully.

We are looking forward to welcome you again
at our next Workshop „ALD for Industry“
on December 1 – 2, 2021. Save the Date!

If you have any problems have a look at our
Technical Support for Teams Meetings [PDF]
or contact us:

Program | 02.12.2020

12:00 – 13:00    Warm-UP
Registration, Technical Support & Networking

  • Market Place
    Visit the companies on the right site. Get in contact and ask your questions in open „Meeting Rooms“ or by direct contact.
  • Break Room & Pinboard Chat – Who is Who? | open all time
    Present your interest and find the right partner. During break moderated group to present yourself to the participants.
    The chat can be used as pinboard. Leave your message and give comments to other messages. „Search & Find“

13:00     Opening & Tutorial Session

13:10 | Current and Emerging ALD Processes, Precursors, IP Trends and Applications in High Volume Production
Jonas Sundqvist, BALD Engineering AB, Dresden, Germany

13:30 | ALE for Nanopatterning
Dmitry Suyatin, Lund University, Lund, Sweden

13:50 | Precursor Chemistry for the ALD of Functional Thin Films: Synthesis, Evaluation and Applications
Nils Boysen, Ruhr-Universität, Bochum, Germany

14:10     Break
14:20    Market Place & Meeting Rooms

  • Market Place
    Visit the Companies on the right sight. Get in contact and ask your questions in open „Meeting Rooms“ or direct contact.
  • Tutorial – Talk | Q& A | 14:20 – 14:40
    Ask questions to tutorial speakers. Moderated Discussion.

14:40     Workshop Session

14:40 | Keynote Lecture
When Time-Resolved CVD Outperforms Continous CVD-ALD as the Enabler for InN Based Electronics
Henrik Pedersen, Linköping University, Sweden

15:10 | ALD of Noble Metals – Challenges & Perspectives for Ru and Pt ALD Precursors
Nicolas Blasco, Air Liquide, Paris, France

15:30 | ALD for Challenging 3D Structures: Industrial Applications
Christoph Hossbach, Picosun Oy and Picosun Europe GmbH, Dresden, Germany

15:45     Break
15:55    Market Place & Company Tour

  • Market Place
    Visit the Companies on the right sight. Get in contact and ask your questions in open „Meeting Rooms“ or direct contact.
  • Company Tour at FHR Anlagenbau GmbH

    „Company Introduction & 1st Spatial ALD Machine“
    Hannes Klumbies, FHR Anlagenbau GmbH, Dresden, Germany

16:15     Workshop Session

16:15 | Batch ALD for 5G High Volume Applications
Ganesh Sundaram, Veeco Instruments, Waltham, USA

16:30 | Industrial Production of Moisture Barrier Coatings by Atomic Layer Deposition
Kalle Niiranen, Beneq Oy, Espoo, Finland

16:45 | Conformal Thick Dielectric Deposition on 3D Structures at CVD Speed
Veronique De Jonghe, Plasma-Therm, St. Petersburg, USA

17:00     End of official program – Day 1

17:00 – 18:00 AFTER WORK Meeting & ALD-Quiz
You would like to talk with your colleagues in a more relaxed atmosphere? Join the AFTER WORK Meeting.

It is recommended to choose a relaxed place and take a beer or a glas of wine.

Program | 03.12.2020

Enter the Event by a klick on the Button below.

8:30 – 9:00    Warm-UP
Networking & Tour

  • Market Place
    Visit the companies on the right site. Get in contact and ask your questions in open „Meeting Rooms“ or by direct contact.
  • Tour at Trumpf Hüttinger | 8:40 – 9:00
    „Production-Tour Video & RF- and MW- Power Generators for PEALD applications”
    Carsten Winnewisser, Trumpf Hüttinger GmbH + Co. KG, Freiburg, Germany

09:00     Tutorials Session

09:00 | In Situ Metrology for ALD Processes
Martin Knaut, TU Dresden, Dresden

09:20 | Optimization of Atomic Layer Deposition Processes Using Simulation: an Overview
Linda Jäckel, Fraunhofer ENAS, Chemnitz

09:40 | ALD for Photovoltaic Applications
Tobias Törndahl, Uppsala University, Uppsala, Sweden

10:00     Break
10:10    Market Place & Meeting Rooms

  • Market Place
    Visit the Companies on the right sight. Get in contact and ask your questions in open „Meeting Rooms“ or direct contact.
  • Tutorial – Talk | Q & A | 10:10 – 10:30
    Ask questions to tutorial speakers. Moderated Discussion.

10:30     Workshop Session

10:30 | Elevator Pitch
MKS Instruments GmbH; Gencoa Ltd.; VAT Deutschland GmbH; Pegasus Chemicals

11:00 | ALD at CEA-Leti: From Research to Applications
Remy Gassilloud, CEA Leti, Grenoble, France

11:20 | Innovative ALD Industrial Services
Joël Matthey, Positive Coating,
La Chaux-de-Fonds, Switzerland

11:40ALD of Titanium Nitride as Ultra-Thin-Lithium-Ion Diffusion Barrier
Sascha Böhnhardt, Fraunhofer IPMS CNT, Dresden, Germany

12:00     Break
12:10    Market Place & Meeting Rooms

  • Market Place
    Visit the Companies on the right sight. Get in contact and ask your questions in open „Meeting Rooms“ or direct contact.
  • ALD – Talk | Panel Discussion | 12:10 – 12:30
    Networking and topical discussion. Ask questions to experts.
    Moderated by Jonas Sundqvist, BALD Engineering, Värmdö, Sweden

    „How fast can ALD become” 
    | Jacques Kools, Encapsulix SAS, Simiane-Collongue, France
    “Future of ALD – Emerging Markets”  |  Nicolas Blasco, Air Liquide, Paris, France

12:30     Workshop Session

12:30Direct Atomic Pattern Printing
Maksym Plakhotnyuk, ATLANT 3D Nanosystems,
Kgs. Lyngby, Denmark

12:45 | Large Area ALD Coatings for Health, Environment and Energy Applications
Jacques Kools, Encapsulix SAS, Simiane-Collongue, France

13:00 | Aspects of ALD Work within the FMD and Potential Extensions
Bernd Hintze, Research Fab Microelectronics Germany (FMD), Dresden, Germany

13:15 | In-Situ-Real-Time and Ex-Situ Spectroscopic Analysis of Al2O3 Films Prepared by Plasma Enhanced Atomic Layer Deposition
Paul Plate, SENTECH Instruments GmbH, Berlin, Germany

13:30 | Plasma ALD Processing of GaN Power and RF Devices for High Volume Manufacturing
Aileen O´Mahony, Oxford Instruments, Bristol, United Kingdom

13:45 End of the official program – Day 2

All rooms are open after the event for longer discussions.

  

Program committee

This Event is organized in cooperation
with BALD Engineering AB

Market Place

In the Market Place you can discover 17 Companies from the field of ALD Technology. Discover their offers and products and get in contact by visiting the „Meeting Room“ or via Phone / E-mail. Here you can discuss your questions with the experts.

Thank you to all Sponsors for their support of the Event!

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