Meyer Burger (Germany) AG



  • Construction of deposition and plasma treatment plant
  • Plasma technology components


  • Architectural glass, displays, solar
  • Optical device construction, photonics
  • Sensor and microsystem technology, smart systems
  • Medical technology and life sciences

Member since: 1993

Meyer Burger (Germany) AG

An der Baumschule 6-8
09337 Hohenstein-Ernstthal (Germany)

+49 3723 671 234

+49 3723 671 1000

Klaus Ruhmer


Drawing upon broad experience and expertise, Meyer Burger (Germany) AG - BU MicroSystems is a worldwide operating company that provides advanced technology solutions for high-precision coating, structuring and processing of surface areas through the application of plasma and ion beam technologies. The process systems feature a modular composition that ensures a flexible adaption to various methods of surface treatment, such as reactive ion etching (RIE), plasma-enhanced chemical vapor deposition (PECVD) or ion beam etching and deposition (IBE, IBD). The complex systems are mainly used in the semiconductor industry, precision optics and sensor manufacturing as well as in laboratory applications. The company has long customer relationships with leading industrial and academic research institutions. The product range of MicroSystems ranges from systems for wafer processing on large-scale applications to strip processing plants, on which a wide range can be realized in technical processes. The systems primarily differ from competitors by the proprietary in-house developed key components such as plasma and ion beam sources.

Plasma Technology:

  • Physical Vapor Deposition (PVD)
  • Plasma Enhanced Chemical Vapor Deposition (PECVD)
  • Reactive Ion Etching (RIE)

Ion Beam Technology:

  • Ion Beam Trimming (IBT) / Ion Beam Figuring (IBF)
  • Ion Beam Etching (IBE)
  • Reactive Ion Beam Etching (RIBE)
  • Chemical Assisted Ion Beam Etching (CAIBE)
  • Ion Beam Deposition (IBD)
  • Dual Ion Beam Deposition (DIBD)